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Chemicals at a typical semiconductor fab

CHEMICAL NAME WT % 1 CONSTITUENT 1 WT % 2 CONSTITUENT 2 WT % 3 CONSTITUENT 3 HAZARD CLASS LOCATION QUANTITY UNITS CONTAINER
Diesel             CL JJ 500 Gal AGT
*EMT-130-3 50-80% N-Methyl Pyrrolidone 40% Diethylene Glycol Butyl Ether     CL II 400 Gal CAN
Vacuum Pump Oil             CL II 330 Gal DRUM
Diesel             CL WW3 165 Gal DRUM
Waste Non-RCRA Hazardous Liquid (Waste Oil)             CL WW2 110 Gal DRUM
Waste Oil             CL WW2 110 Gal DRUM
*2164 Organic Flux 10% Hydroxyacetic Acid 35% Organic Salts, Surfactants     CL II 100 Gal BOT
*Microposit Remover 1112A 28% Diethylene Glycol n-butyl ether 27% 2-Butoxyethanol 16% Ethanolamine CL HH 80 Gal BOT
*EKC 3000 Rinse 45-55% Dipropylene Glycol Methyl Ether 45-55% Dipropylene Glycol Methyl Ether Acetate 1-2% Methyldiethanolamine CL II 50 Gal BOT
Tinning ORL 5751 Hydrocarbon Mixture             CL II 50 Gal PAIL-DRUM
*OIR 907-17 25-60% Ethyl-3-Ethyoxypropionate (EEP) 15-45% 3-Methoxypropionic Acid, Methyl Ester (MMP) 8-20% Novolak Polymer, Reaction Products with Naphthoquinone Diazide Ester CL AA 40 Gal BOT
*EMT 130-3 90-95% n-Methyl Pyrrolidone <20% Diethylene Glycol Butyl Ether     CL AA 30 Gal BOT
*EKC Universal 1 (Universal Photoresist Stripper) 30-40% C10-C16 Alkylbenzene 30-40% Dodecylbenzenesulfonic Acid 10-20% Xylenesulfonic Acid CL AA 25 Gal BOT
*EKC 3000 Rinse 45-55% Dipropylene Glycol Methyl Ether 45-55% Dipropylene Glycol Methyl Ether Acetate 1-2% Methyldiethanolamine CL AA 25 Gal BOT
*Ultramac Solvent EPA 85% Propylene Glycol Monomethyl Ether Acetate 8.50% n-Butyl Acetate 6.50% Xylene CL AA 20 Gal BOT
Tetraethyl - Orthosilicate             CL II 20 Gal BOT
Vaco Line Lubricating Oil             CL D 15 Gal PAIL-DRUM
*OIR 907-12 25-60% Ethyl-3-Ethoxypropionate (EEP) 15-45% 3-Methoxypropionic Acid, Methyl Ester (MMP) 8-20% Novolak Polymer, Reaction Products with Naphthoquinone Diazide Ester CL K 10 Gal BOT-EQUP
*Kester 2164 Organic Flux 10% Hydroxyacetic Acid         CL G 8 Gal BOT-EQUP
*EKC Universal 1 (Universal Photoresist Stripper) 30-40% C10-C16 Alkylbenzene 30-40% Dodecy+E328lbenzen-sulfonic Acid E24 10-20% Xylenesulfonic Acid CL N 6 Gal BOT-EQUP
Borofilm74 75-85% Ethylene Glycol Monoethyl Ether         CL AA 6 Gal BOT
*alphametals 265 HF Flux 5-10% Glycerin <4% Nonylphenoxy-polyethoxyethanol     CL G 5 Gal BOT-EQUP
*EMT 130-3 90-95% n-Methyl Pyrrolidone <20% Diethylene Glycol Butyl Ether     CL L 5 Gal BOT
*Kester 5751 Dross Inhibiting Fluid 99% Polyethoxylated Glycols         CL G 5 Gal BOT-EQUP
*New Dimensions Citragold 1-5% Potassium Hydroxide         CL GW 5 Gal BOT
*Bioact EC-7R Defluxer 90-98% Terpene Hydrocarbons         CL C 5 Gal PAIL-DRUM
Engine Oil             CL GW 5 Gal BOT
*EKC Universal 1 (Universal Photoresist Stripper) / 922 30-40% C10-C16 Alkylbenzene 30-40% Dodecylbenzenesulfonic Acid 10-20% Xylenesulfonic Acid CL O 4 Gal BOT-EQUP
*EPA-80 Solvent             CL H 4 Gal BOT
Tinning Oil             CL G 4 Gal BOT
*EKC 3000 Rinse 45-55% Dipropylene Glycol Methyl Ether 45-55% Dipropylene Glycol Methyl Ether Acetate 1-2% Methyldieth-anolamine CL O 3 Gal BOT-EQUP
EMT 130-3 (N-Methyl Pyrrolidone)             CL N 3 Gal BOT
HE-175 Vacuum Pump Oil             CL F 3 Gal BOT
*Shape RTS-A 75% Naphtha 25% Isopropyl Alcohol     CL G 2 Gal BOT-EQUP
Hexamethyldisalizane             CL O 2 Gal BOT-EQUP
Methanol             CL H 2 Gal BOT
Tetraethyl - Orthosilicate             CL P 2 Gal BOT-EQUP
Trimethyl Phosphate             CL P 2 Gal BOT-EQUP
Hydrogen Chloride             CORR-G GG 3500 Cu Ft CYL
Silicon Tetrachloride             CORR-G GG 1000 Cu Ft CYL
Hydrogen Fluoride             CORR-G GCII 68 Cu Ft CYL
Boron Trifluoride             CORR-G T 2 Cu Ft CYL
Waste Hydrofluoric Acid             CORR-L QQ 5000 Gal AGT
Sodium Hydroxide             CORR-L RR 1800 Gal AGT
Hydrofluoric Acid: (Straight; 2:1; 10:1; 50:1)             CORR-L HH 1000 Gal BOT
Sulfuric Acid 36%             CORR-L RR 1000 Gal AGT
Buffered Oxide Etch <10% Hydrofluoric Acid 50% Ammonium Bifluoride     CORR-L HH 700 Gal BOT
Sodium Hydroxide             CORR-L NN 600 Gal AGT
Sodium Hydroxide             CORR-L NN 600 Gal AGT
Sulfuric Acid             CORR-L HH 600 Gal BOT
Sodium Hydroxide             CORR-L KK 400 Gal AGT
Pae Etch 20% Acetic Acid 80% Ammonium Bifluoride     CORR-L HH 300 Gal BOT
Phosphoric Acid Etch 36% Phosphoric Acid <5% Nitric Acid 59% Acetic Acid CORR-L HH 300 Gal BOT
*OPD-4262 <1-10% Tetramethyl ammonium hydroxide         CORR-L II 300 Gal BOT
Sodium Hypochlorite             CORR-L KK 275 Gal DRUM
*EKC Universal 1 (Universal Photoresist Stripper) / 922 30-40% C10-C16 Alkylbenzene 30-40% Dodecylbenzen-sulfonic Acid 10-20% Xylenesulfonic Acid CORR-L II 250 Gal BOT
Hydrochloric Acid             CORR-L MM 250 Gal DRUM
Phosphoric Acid             CORR-L HH 240 Gal BOT
Hydrochloric Acid             CORR-L NN 200 Gal AGT
Sodium Hydroxide             CORR-L KK 200 Gal AGT
Maleic Acid Polymer             CORR-L KK 165 Gal DRUM
Sodium Hydroxide             CORR-L LL 165 Gal DRUM
Sulfuric Acid             CORR-L LL 165 Gal DRUM
Sulfuric Acid 36%             CORR-L ZZ 165 Gal DRUM
Acetic Acid             CORR-L II 108 Gal BOT
Ammonium Fluoride             CORR-L HH 108 Gal BOT
Ammonium Hydroxide             CORR-L HH 108 Gal BOT
Hydrochloric Acid             CORR-L HH 108 Gal BOT
Potassium Hydroxide             CORR-L HH 108 Gal BOT
Potassium Hydroxide Developer             CORR-L I 75 Gal CYL
Sodium Hypochlorite             CORR-L LL 55 Gal DRUM
Buffered Oxide Etch 10% Hydrofluoric Acid 50% Ammonium Fluoride     CORR-L CC 54 Gal BOT
Hydrofluoric Acid             CORR-L CC 54 Gal BOT
Sulfuric Acid             CORR-L CC 50 Gal BOT
Wright Etch (Hydrofluoric Acid/Acetic Acid)             CORR-L HH 50 Gal BOT
*Chromium Etchant CR-4 9% Nitric Acid 9% Ceric Ammonium Nitrate     CORR-L HH 30 Gal BOT
*OPD-4262 <1-10% Tetramethyl Ammonium Hydroxide         CORR-L AA 30 Gal BOT
Silicon Tetrachloride             CORR-L BB 30 Gal CYL
*Pae Aluminum Etchant 73% Phosphoric Acid 3.30% Acetic Acid 3.20% Nitric Acid CORR-L CC 25 Gal BOT
Hydrofluoric Acid             CORR-L W 25 Gal BOT-EQUP
CEP 200 (Perchloric Acid)             CORR-L HH 24 Gal BOT
Phosphoric Acid             CORR-L CC 24 Gal BOT
Hydrochloric Acid             CORR-L CC 21 Gal BOT
*Silox Vapox Etch III 30% Ammonium Fluoride 8% Acetic Acid 4% Hydrofluoric Acid CORR-L HH 20 Gal BOT
*OPD-4262 <1-10% Tetramethyl Ammonium Hydroxide         CORR-L K 20 Gal BOT-EQUP
Chromium Trioxide             CORR-L HH 20 Gal BOT
Acetic Acid             CORR-L W 18 Gal BOT
Ammonium Fluoride             CORR-L CC 18 Gal BOT
Sulfuric Acid             CORR-L N 18 Gal BOT-EQUP
EKC 922 (Alkyl Benzene)             CORR-L AA 16 Gal BOT
Acetic Acid             CORR-L II 15 Gal BOT
Hydrofluoric Acid             CORR-L W 15 Gal BOT-EQUP
MF-28 Developer 10% Ethanolamine 10% Tetramethyl Ammonium Hydroxide     CORR-L Y 12 Gal BOT-EQUP
Microposit 1112A Stripper <5% Glycol Ethers <55% 2-Butoxy Ethanol     CORR-L B 12 Gal BOT
Acetic Acid             CORR-L Y 12 Gal BOT-EQUP
Acetic Acid             CORR-L CC 12 Gal BOT
Hydrofluoric Acid             CORR-L S 12 Gal BOT-EQUP
Hydrofluoric Acid             CORR-L N 12 Gal BOT-EQUP
Hydrofluoric Acid             CORR-L P 12 Gal BOT-EQUP
Nitric Acid             CORR-L Y 12 Gal BOT-EQUP
ODP 2462 (Tetramethyl Ammonium Hydroxide)             CORR-L Y 12 Gal BOT
Sodium Hydroxide             CORR-L HH 12 Gal BOT
Sulfuric Acid             CORR-L P 12 Gal BOT-EQUP
Sulfuric Acid             CORR-L W 12 Gal BOT-EQUP
Sulfuric Acid             CORR-L Y 12 Gal BOT-EQUP
Sulfuric Acid & Hydrogen Peroxide             CORR-L S 12 Gal BOT-EQUP
*AmSolv AmTreat 084K 4-6% Sodium Hydroxide 2-4% Sodium Nitrite 2-4% Sodium Tetraborate Pentahydrate CORR-L KK 10 Gal PAIL-DRUM
Ammonium Hydroxide             CORR-L CC 10 Gal BOT
Waste Corrosive Liquid, Acidic, Inorganic, NOS             CORR-L WW1 10 Gal PAIL
EMT-130 90-95% n-Methyl Pyrrolidone         CORR-L Y 9 Gal BOT-EQUP
Hydrofluoric Acid             CORR-L Y 9 Gal BOT-EQUP
Phosphoric Acid             CORR-L Y 9 Gal BOT-EQUP
Fuming Nitric Acid 90%             CORR-L HH 8 Gal BOT
*Cyantek CR-4 Chromium Etchant 9% Nitric Acid 9% Ceric Ammonium Nitrate     CORR-L CC 7 Gal BOT
Buffered Oxide etch 50% Ammonium Fluoride 10% Hydrofluoric Acid     CORR-L L 6 Gal BOT
Acetic Acid             CORR-L N 6 Gal BOT-EQUP
Ammonium Fluoride             CORR-L N 6 Gal BOT-EQUP
Nitric Acid             CORR-L N 6 Gal BOT-EQUP
Phosphoric Acid             CORR-L N 6 Gal BOT-EQUP
Phosphorous Oxychloride             CORR-L CC 6 Gal BOT
Potassium Hydroxide             CORR-L N 6 Gal BOT-EQUP
Sulfuric Acid             CORR-L B 6 Gal BOT
Sulfuric Acid             CORR-L L 6 Gal BOT
Sulfuric Acid             CORR-L G 6 Gal BOT-EQUP
*CEP-200 Etchant 4.60% Perchloric Acid         CORR-L B 5 Gal BOT
Wright Etch (Hydrofluoric Acid/Acetic Acid)             CORR-L L 5 Gal BOT
*EKC Universal 1 (Universal Photoresist Stripper) 30-40% C10-C16 Alkylbenzene 30-40% Dodecylbenzene-sulfonic Acid 10-20% Xylenesulfonic Acid CORR-L C 4 Gal BOT
Fuming Nitric Acid 90%             CORR-L L 4 Gal BOT
ODP 2462 (Teramethyl Ammonium Hydroxide)             CORR-L K 4 Gal BOT-EQUP
Acetic Acid             CORR-L L 3 Gal BOT
Ammonium Hydroxide             CORR-L L 3 Gal BOT
Hydrochloric Acid             CORR-L R 3 Gal EQUP
Hydrochloric Acid             CORR-L G 3 Gal BOT-EQUP
Hydrofluoric Acid             CORR-L R 3 Gal EQUP
Hydrofluoric Acid             CORR-L L 3 Gal BOT
Hydrofluoric Acid             CORR-L ZZ 3 Gal BOT
Nitric Acid             CORR-L L 3 Gal BOT
Phosphoric Acid             CORR-L L 3 Gal BOT
Sulfuric Acid             CORR-L R 3 Gal EQUP
Acetic Acid             CORR-L G 2 Gal BOT-EQUP
Chromium Trioxide             CORR-L D 2 Gal BOT
Hydrofluoric Acid             CORR-L D 2 Gal BOT
Boron Tribromide             CORR-L U 1 Gal EQUP
Boron Tribromide             CORR-L W 1 Gal EQUP
Chromium Trioxide             CORR-L L 1 Gal BOT
Hydrochloric Acid             CORR-L L 1 Gal BOT
Phosphorous Oxychloride             CORR-L P 1 Gal EQUP
Phosphorous Oxychloride             CORR-L W 1 Gal EQUP
Phosphorous Oxychloride             CORR-L U 1 Gal BOT
Waste Non-RCRA Hazardous Solid Corrosive Debris (Acid Contaminated Waste/ Corrosive Solid)             CORR-S WW1 3000 Lbs DRUM
*Comco Powders C (99% Aluminum Oxide), G (100% Sodium Bicarbonate), H (100% Organic Ligno-Cellulose)             CORR-S II 250 Lbs BOT
Chromium Trioxide             CORR-S ZZ 5 Lbs BOT
Liquid Nitrogen             CRYO